Standard
UPDATE AVAILABLE
AS/NZS 14644.3:2009
[Superseded]Cleanrooms and associated controlled environments, Part 3: Test methods (ISO 14644-3:2005, MOD)
Adopts ISO 14644-3:2005 with national modifications to provide test methods for unidirectional and non-unidirectional flow cleanrooms.
Published: 10/03/2009
Pages: 67
Table of contents
Cited references
Content history
Table of contents
Header
About this publication
Preface
Introduction
1 Scope
2 Normative references
3 Terms and definitions
3.1 General
3.2 Airborne particle measurement
3.3 Air filters and systems
3.4 Airflow and other physical states
3.5 Electrostatic measurement
3.6 Measuring apparatus and measuring conditions
3.7 Occupancy states
4 Test procedures
4.1 Cleanroom tests
4.1.1 Required test
4.1.2 Optional tests
4.2 Principle
4.2.1 Airborne particle count
4.2.2 Airflow test
4.2.3 Air pressure difference test
4.2.4 Installed filter system leakage tests
4.2.5 Airflow direction test and visualization
4.2.6 Temperature and humidity uniformity tests
4.2.7 Electrostatic and ion generator tests
4.2.8 Particle deposition test
4.2.9 Recovery test
4.2.10 Containment leak test
5 Test reports
Annex A
A.1 General
A.2 Test checklist
Annex B
B.1 Airborne particle count for classification and test measurement
B.1.1 Principle
B.1.2 Test procedure
B.1.2.1 General
B.1.2.2 Procedure for airborne particle count
B.1.3 Apparatus for airborne particle count
B.1.4 Test reports
B.2 Airborne particle count for ultrafine particles
B.2.1 Principle
B.2.1.1 General
B.2.1.2 Counting efficiency
B.2.1.3 Particle size cutoff device
B.2.2 Procedure for ultrafine particle count
B.2.3 Apparatus for ultrafine particle count
B.2.4 Test reports
B.3 Airborne particle count for macroparticles
B.3.1 Principle
B.3.2 Sample handling considerations
B.3.3 Measurement methods for macroparticles
B.3.3.1 General
B.3.3.2 Macroparticle measurement with particle collection
B.3.3.2.1 Filter collection and microscopic measurement
B.3.3.2.2 Cascade impactor collection and measurement
B.3.3.3 Macroparticle measurement without particle collection
B.3.3.3.1 General
B.3.3.3.2 Discrete-particle counter (DPC) measurement
B.3.3.3.3 Time-of-flight particle size measurement
B.3.4 Procedure for macroparticle count
B.3.5 Test reports
B.4 Airflow test
B.4.1 Principle
B.4.2 Procedure for unidirectional airflow installation test
B.4.2.1 General
B.4.2.2 Supply airflow velocity
B.4.2.3 Uniformity of velocity within the cleanroom
B.4.2.4 Supply airflow rate measured by filter face velocity
B.4.2.5 Supply airflow rate in air ducts
B.4.3 Procedure for non-unidirectional airflow installation test
B.4.3.1 General
B.4.3.2 Supply airflow rate measured at the inlet
B.4.3.3 Supply airflow rate calculated from filter face velocity
B.4.3.4 Supply airflow rate in air ducts
B.4.4 Apparatus for airflow tests
B.4.5 Test reports
B.5 Air pressure difference test
B.5.1 Principle
B.5.2 Procedure for air pressure difference test
B.5.3 Apparatus for air pressure difference test
B.5.4 Test reports
B.6 Installed filter system leakage test
B.6.1 Principle
B.6.1.1 General
B.6.1.2 Using an aerosol photometer
B.6.1.3 Using a discrete-particle counter (DPC)
B.6.2 Procedures for installed filter system leakage scan test with an aerosol photometer
B.6.2.1 General
B.6.2.2 Choice of upstream aerosol challenge
B.6.2.3 Concentration of upstream aerosol challenge and its verification
B.6.2.4 Determination of probe size
B.6.2.5 Determination of scan rate
B.6.2.6 Procedure for installed filter system leakage scan test
B.6.2.7 Acceptance criteria
B.6.3 Procedure for installed filter system leakage scan test with a DPC
B.6.3.1 General
B.6.3.2 Conditions for aerosol
B.6.3.3 Concentration and verification of upstream aerosol
B.6.3.4 Determination of probe size
B.6.3.5 Procedure for installed filter system leakage scan test
B.6.3.6 Preparatory calculations and evaluation
B.6.3.6.1 Symbols and flow diagram of preparatory calculations and evaluation
B.6.3.6.2 Standard leak penetration of the filter to be tested, PL
B.6.3.6.3 Expected number of particle counts, Np, and acceptance criteria, Ca
B.6.3.6.4 The scan rate, Sr
B.6.3.6.5 Sustained residence time, Tr, and Npa and Ca for Tr
B.6.3.6.6 Detection of potential leakage by scanning
B.6.3.6.7 Detection of leakage by stationary re-measuring
B.6.3.7 Revision for non-standard flow rate
B.6.3.8 Example of an application with evaluation
B.6.4 Procedure for overall leak test of filters mounted in ducts or air-handling units (AHUs)
B.6.5 Apparatus and materials for installed filter system leakage tests
B.6.5.1
B.6.5.2
B.6.5.3
B.6.5.4
B.6.5.5
B.6.6 Repairs and repair procedures
B.6.7 Test reports
B.7 Airflow direction test and visualization
B.7.1 Principle
B.7.2 Methods
B.7.3 Procedures for airflow direction test and visualization
B.7.3.1 Tracer thread method
B.7.3.2 Tracer injection method
B.7.3.3 Airflow visualization method by image processing techniques
B.7.3.4 Airflow visualization method by the measurement of velocity distributions
B.7.4 Apparatus used for airflow direction test and visualization
B.7.5 Test reports
B.8 Temperature test
B.8.1 Principle
B.8.2 Procedure for temperature test
B.8.2.1 General temperature test
B.8.2.2 Comprehensive temperature test
B.8.3 Apparatus for temperature test
B.8.4 Test reports
B.9 Humidity test
B.9.1 Principle
B.9.2 Procedure for humidity test
B.9.3 Apparatus for humidity test
B.9.4 Test reports
B.10 Electrostatic and ion generator tests
B.10.1 Principle
B.10.2 Procedures for electrostatic and ion generator tests
B.10.2.1 Procedure for electrostatic test
B.10.2.1.1 Measurement of surface voltage level
B.10.2.1.2 Measurement of the static-dissipative property
B.10.2.2 Procedure for ion generator test
B.10.2.2.1 General
B.10.2.2.2 Measurement of discharge time
B.10.2.2.3 Measurement of offset voltage
B.10.3 Apparatus for electrostatic and ion generator tests
B.10.4 Test reports
B.11 Particle deposition test
B.11.1 Principle
B.11.2 Procedure for particle deposition test
B.11.2.1 Collection of particles on witness plates
B.11.2.2 Counting and sizing collected particles
B.11.3 Apparatus for particle deposition test
B.11.3.1 Witness plate material
B.11.3.2 Additional apparatus
B.11.4 Test reports
B.12 Recovery test
B.12.1 Principle
B.12.2 Cleanliness recovery performance
B.12.3 Procedure for recovery test
B.12.3.1 Evaluation by 100:1 recovery time
B.12.3.2 Evaluation by recovery rate
B.12.4 Apparatus and measurement points for recovery test
B.12.4.1
B.12.4.2
B.12.4.3
B.12.5 Test reports
B.13 Containment leak test
B.13.1 Principle
B.13.2 Procedures for containment leak test
B.13.2.1 Discrete-particle counter (DPC) method
B.13.2.2 Photometer method
B.13.3 Apparatus for containment leak test
B.13.3.1
B.13.3.2
B.13.4 Test reports
Annex C
C.1 Airborne particle count
C.1.1
C.2 Ultrafine particle count
C.2.1
C.2.2
C.2.3
C.3 Macroparticle count
C.3.1
C.3.2
C.3.3
C.3.4
C.3.5
C.4 Airflow test
C.4.1 Air velocity meter
C.4.1.1
C.4.1.2
C.4.1.3
C.4.1.4
C.4.2 Airflow meter
C.4.2.1
C.4.2.2
C.4.2.3
C.5 Air pressure difference test
C.5.1
C.5.2
C.5.3
C.6 Installed filter system leakage test
C.6.1 Aerosol photometers
C.6.1.1
C.6.1.2
C.6.2
C.6.3
C.6.4
C.6.5
C.7 Airflow direction test and visualization
C.7.1
C.7.2
C.7.3
C.7.4
C.7.4.1
C.7.4.2
C.8 Temperature test
C.8.1
C.8.2
C.8.3
C.8.4
C.9 Humidity test
C.9.1
C.9.2
C.9.3
C.9.4
C.10 Electrostatic and ion generator test
C.10.1
C.10.2
C.10.3
C.11 Particle deposition test
C.11.1
C.11.2
C.11.3
C.12 Recovery test
C.12.1
C.12.2
C.12.3
C.13 Containment leak test
C.13.1
C.13.2
C.13.3
C.13.4
Bibliography
Appendix ZZ
ZZ1 Introduction
ZZ2 Variations
ZZ3 Explanation
Cited references in this standard
Content history
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