Standard
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AS ISO 14644.3:2021
[Current]Cleanrooms and associated controlled environments, Part 3: Test methods
Identically adopts ISO 14644 3:2019, which provides test methods in support of the operation for cleanrooms and clean zones to meet air cleanliness classification, other cleanliness attributes and related controlled conditions. KEYWORDS: Cleanrooms; Controlled environments; Attributes; Test method
Published: 21/05/2021
Pages: 53
Table of contents
Cited references
Content history
Table of contents
Header
About this publication
Preface
Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
3.1 General terms
3.2 Terms related to airborne particles
3.3 Terms related to air filters and systems
3.4 Terms related to airflow and other physical states
3.5 Terms related to electrostatic measurement
3.6 Terms related to measuring apparatus and measuring conditions
3.7 Terms related to occupancy states
4 Test procedures
4.1 Cleanroom tests
4.1.1 General
4.1.2 Supporting tests
4.2 Principle
4.2.1 Air pressure difference test
4.2.2 Airflow test
4.2.3 Airflow direction test and visualization
4.2.4 Recovery test
4.2.5 Temperature test
4.2.6 Humidity test
4.2.7 Installed filter system leakage tests
4.2.8 Containment leak test
4.2.9 Electrostatic and ion generator tests
4.2.10 Particle deposition test
4.2.11 Segregation test
5 Test reports
Annex A
A.1 General
A.2 Test checklist
A.3 Planning for testing and verification
Annex B
B.1 Air pressure difference test
B.1.1 General
B.1.2 Procedure for air pressure difference test
B.1.3 Apparatus for air pressure difference test
B.1.4 Test reports
B.2 Airflow test
B.2.1 General
B.2.2 Procedure for unidirectional airflow testing
B.2.2.1 General
B.2.2.2 Supply airflow velocity
B.2.2.3 Uniformity of velocity within the cleanroom or clean zone
B.2.2.4 Supply air volume flow rate calculated from the velocity measurement
B.2.2.5 Supply air volume flow rate calculated from velocity measurement in air ducts
B.2.3 Procedure for non-unidirectional airflow test
B.2.3.1 General
B.2.3.2 Supply air volume flow rate measured using a capture hood
B.2.3.3 Supply air volume flow rate calculated by velocity measurement
B.2.3.4 Supply air volume flow rate calculated by velocity measurement in air ducts
B.2.4 Apparatus for airflow tests
B.2.5 Test reports
B.3 Airflow direction test and visualization
B.3.1 General
B.3.2 Methods
B.3.3 Procedures for airflow direction test and visualization
B.3.3.1 Tracer thread method
B.3.3.2 Tracer injection method
B.3.3.3 Airflow visualization method by image processing techniques
B.3.3.4 Evaluation of airflow distribution by measurement of velocity distributions
B.3.4 Apparatus used for airflow direction test and visualization
B.3.5 Test reports
B.4 Recovery test
B.4.1 General
B.4.2 Cleanliness recovery performance
B.4.3 Procedure for recovery test
B.4.3.1 Selection of measuring points
B.4.3.2 Test method
B.4.3.3 Evaluation by 10:1 or 100:1 recovery time
B.4.3.4 Evaluation by recovery rate
B.4.4 Apparatus for recovery test
B.4.5 Test reports
B.5 Temperature test
B.5.1 General
B.5.2 Apparatus for temperature test
B.6 Humidity test
B.6.1 General
B.6.2 Apparatus for humidity test
B.7 Installed filter system leakage test
B.7.1 General
B.7.1.1 Methods
B.7.1.2 Aerosol photometer method
B.7.1.3 Light-scattering airborne-particle counter (LSAPC) method
B.7.2 Procedure for installed filter system leakage scan test with an aerosol photometer
B.7.2.1 General
B.7.2.2 Determination of probe size
B.7.2.3 Determination of scan rate
B.7.2.4 Acceptance criteria
B.7.2.5 Choice of upstream aerosol challenge
B.7.2.6 Concentration of upstream aerosol challenge and its verification
B.7.2.7 Procedure for installed filter system leakage scan test
B.7.3 Procedure for installed filter system leakage scan test with a LSAPC
B.7.3.1 General
B.7.3.2 Determination of probe size
B.7.3.3 Determination of scan rate
B.7.3.4 Particle size to be counted and acceptance criteria
B.7.3.5 Expected number of particle counts
B.7.3.6 Choice of upstream aerosol challenge
B.7.3.7 Concentration of upstream aerosol challenge and its verification
B.7.3.8 Procedure for installed filter system leakage test, stage 1 scan test
B.7.3.8.1 General
B.7.3.8.2 Measuring parameters for two scanning types
B.7.3.9 Procedure for stationary re-measuring
B.7.3.9.1 General
B.7.3.9.2 Detection of leakage by stationary re-measuring
B.7.3.9.3 Determination of measuring parameters for stationary re-measuring
B.7.3.10 Example of an application with evaluation
B.7.4 Procedure for overall leak test of filters mounted in ducts or air-handling units (AHUs)
B.7.5 Apparatus and materials for installed filter system leakage tests
B.7.5.1
B.7.5.2
B.7.5.3
B.7.5.4
B.7.5.5
B.7.6 Repairs and repair procedures
B.7.7 Test reports
B.8 Containment leak test
B.8.1 General
B.8.2 Procedures for containment leak test
B.8.2.1 Light-scattering airborne-particle counter (LSAPC) method
B.8.2.2 Aerosol photometer method
B.8.3 Apparatus for containment leak test
B.8.3.1
B.8.3.2
B.8.4 Test reports
B.9 Electrostatic and ion generator tests
B.9.1 General
B.9.2 Procedures for electrostatic and ion generator tests
B.9.2.1 Procedure for electrostatic test
B.9.2.1.1 Measurement of surface voltage level
B.9.2.1.2 Measurement of the static-dissipative property
B.9.2.2 Procedure for ion generator test
B.9.2.2.1 General
B.9.2.2.2 Measurement of discharge time
B.9.2.2.3 Measurement of offset voltage
B.9.3 Apparatus for electrostatic and ion generator tests
B.9.3.1
B.9.3.2
B.9.3.3
B.9.4 Test reports
B.10 Particle deposition test
B.10.1 General
B.10.2 Procedure for particle deposition test
B.10.2.1 Collection of particles on witness plates
B.10.2.2 Counting and sizing collected particles
B.10.3 Apparatus for particle deposition test
B.10.4 Determination of sampling time and surface area
B.10.5 Test reports
B.11 Segregation test
B.11.1 General
B.11.2 Procedure
B.11.2.1 Generation of reference concentration
B.11.2.2 Equipment geometry
B.11.2.3 Procedure of measurement
B.11.2.4 Calculating the protection index
B.11.3 Test reports
Annex C
C.1 General
C.2 Air pressure difference test
C.2.1 General
C.2.2
C.2.3
C.2.4
C.3 Airflow test
C.3.1 Air velocity meter
C.3.1.1 General
C.3.1.2
C.3.1.3
C.3.1.4
C.3.1.5
C.3.1.6
C.3.2 Airflow meter
C.3.2.1 General
C.3.2.2
C.3.2.3
C.3.2.4
C.4 Airflow direction test and visualization
C.4.1
C.4.2
C.4.3
C.4.4
C.4.4.1
C.4.4.2
C.4.4.3
C.5 Recovery test
C.5.1
C.5.2
C.5.3
C.5.4
C.6 Temperature test
C.7 Humidity test
C.8 Installed filter system leakage test
C.8.1
C.8.2
C.8.3
C.8.4
C.8.5
C.9 Containment leak test
C.9.1
C.9.2
C.9.3
C.9.4
C.9.5
C.10 Electrostatic and ion generator test
C.10.1
C.10.2
C.10.3
C.11 Particle deposition test
C.11.1
C.11.2
C.11.3
C.11.4
C.11.5
C.11.6
C.12 Segregation test
C.12.1
C.12.2
C.12.3
C.12.4
Bibliography
Cited references in this standard
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