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AS/NZS ISO 14644.5:2006

[Current]

Cleanrooms and associated controlled environments, Part 5: Operations

Adopts of ISO 14644-5:2004 to specify basic requirements for cleanroom operations. It is intended for those planning to use and operate a cleanroom.
Published: 06/01/2006
Pages: 44
Table of contents
Cited references
Content history
Table of contents
Header
About this publication
Preface
Introduction
1 Scope
2 Normative references
3 Terms and definitions
3.1 General Terms
3.2 Occupancy states
4 Specification of requirements
4.1 Operational systems
4.1.1
4.1.2
4.1.3
4.1.4
4.1.5
4.1.6
4.1.7
4.2 Cleanroom clothing
4.2.1
4.2.2
4.2.3
4.2.4
4.2.5
4.2.6
4.2.7
4.2.8
4.2.9
4.2.10
4.2.11
4.2.12
4.2.13
4.3 Personnel
4.3.1
4.3.2
4.3.3
4.3.4
4.3.5
4.4 Stationary equipment
4.4.1
4.4.2
4.4.3
4.4.4
4.4.5
4.4.6
4.5 Materials and portable and mobile equipment
4.5.1
4.5.2
4.5.3
4.5.4
4.5.5
4.6 Cleanroom cleaning
4.6.1
4.6.2
4.6.3
4.6.4
4.6.5
4.6.6
Annex A
A.1 General
A.2 Assessing contamination risks
A.2.1 Methods for assessing risks
A.2.2 Determining operational risks
A.2.2.1 General
A.2.2.2 Cleanroom clothing
A.2.2.3 Personnel
A.2.2.4 Stationary equipment
A.2.2.5 Materials and portable and mobile equipment
A.2.2.6 Cleanroom cleaning
A.3 Monitoring and corrective action
A.4 Education and training
A.4.1 Involvement
A.4.2 Training course contents
A.4.3 Monitoring of cleanroom personnel and corrective action
A.4.4 Training documentation
A.5 Cleanroom support services
A.5.1 General overview
A.5.2 Record of the installation
A.5.3 Operating and maintenance instructions
A.5.4 Performance monitoring
A.5.5 Maintenance procedures
A.5.6 Maintenance records
A.6 Upgrading and modifying the cleanroom
A.7 Safety
Annex B
B.1 Function of cleanroom clothing
B.2 General choice of cleanroom clothing
B.3 Properties of fabric
B.3.1 Barrier properties
B.3.2 Durability
B.3.3 Electrostatic properties
B.3.4 Other physical properties
B.4 Design and construction of cleanroom clothing
B.4.1 Construction of clothing
B.4.2 General design
B.4.3 Dispersal chamber (body box)
B.5 Thermal comfort
B.6 Cleanroom clothing cleaning process and frequency of change
B.7 Gloves
B.8 Face masks and other headgear
B.9 Storage of clothing
B.9.1
B.9.2
B.9.3
B.9.4
Annex C
C.1 Training
C.2 Access by personnel
C.3 Clothing and personal items
C.4 Hygiene
C.5 Cleanroom clothing changing procedures
C.6 Discipline and conduct
C.7 Safety
C.7.1
C.7.2
C.8 Personnel initiatives
Annex D
D.1 General
D.2 Clean entry process
D.2.1 Planning
D.2.2 Inspection and removal of non-cleanroom packaging
D.2.3 Removing cleanroom packaging
D.3 Transporting equipment
D.4 Installation procedures
D.5 Maintenance and repair
D.6 Equipment removal
Annex E
E.1 General
E.2 Criteria for selection
E.2.1 Characteristics
E.2.2 Other criteria
E.3 Preliminary testing
E.4 Entry and exit procedures
E.4.1 Unpacking and entry procedures
E.4.2 Entry of materials through pipes
E.4.3 Exit procedures for materials and portable equipment
E.4.3.1 Personal and small equipment
E.4.3.2 Waste Materials
E.5 Types of materials and portable equipment
E.5.1 General
E.5.2 Cleanroom clothing materials
E.5.3 Solutions and finishes used in cleaning
E.5.4 Wipers
E.5.5 Vacuum cleaners, hoses and handles
E.5.6 Mops
E.5.7 Buckets and wringers
E.5.8 Floor scrubbers, buffing and waxing machines
E.5.9 Stepladders
E.5.10 Brooms or brushes
E.5.11 Receptacles for rubbish and recycling
E.5.12 Cleanroom mats and sticky flooring
E.5.13 Clean containers and packaging
E.5.14 Hand tools, boxes and maintenance equipment
E.5.15 Safety equipment
E.5.16 Written documentation
E.5.17 Electronic documentation
E.5.18 Other materials
E.6 Storage
Annex F
F.1 Overview
F.2 Surface classification
F.2.1 General
F.2.2 Critical surfaces
F.2.3 General cleanroom surfaces
F.2.4 Surfaces of changing rooms and transfer areas
F.3 Basic cleaning
F.3.1 General
F.3.2 Basic cleaning categories
F.3.3 Vacuum cleaning
F.3.4 Wet cleaning
F.3.5 Damp cleaning
F.4 Cleaning specific surfaces
F.4.1 Identifying surfaces to be cleaned
F.4.2 Floors and subfloors
F.4.3 Walls, doors, return grilles, windows and vertical surfaces
F.4.4 Ceilings, diffusers and lamp fixtures
F.4.5 Tables and other critical horizontal surfaces
F.4.6 Cleanroom chairs, furniture and ladders
F.4.7 Stationary equipment
F.4.8 Carts and trolleys
F.4.9 Hazardous processing surfaces
F.4.10 Cross-over benches, supply and cleanroom clothing supply cabinets, lockers and other compartmented surfaces
F.4.11 Rubbish bins and containers
F.4.12 Cleanroom mats and sticky flooring
F.5 Surface treatment
F.5.1 General
F.5.2 Anti-static treatment
F.5.3 Disinfection
F.6 Cleaning personnel
F.7 Cleaning programme
F.7.1 Preparing a cleaning programme
F.7.2 Scheduling the cleaning programme
F.7.3 Regular cleaning
F.7.4 Periodic cleaning
F.7.5 Cleaning during and after construction or maintenance
F.7.6 Cleaning during emergency situations
F.8 Monitoring cleaning effectiveness and testing
F.8.1 Particle contamination
F.8.2 Microbiological contamination
F.9 Construction-related cleaning programme
Bibliography
Cited references in this standard
Content history
[Superseded]
[Superseded]
DR 05305
AS/NZS ISO 14644.5:2006 Rec:2016