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AS ISO 14644.1:2017
[Current]Cleanrooms and associated controlled environments, Part 1: Classification of air cleanliness by particle concentration
Adopts ISO 14644-1:2015 to specify the classification of air cleanliness in terms of concentration of airborne particles in cleanrooms and clean zones; and separative devices as defined in AS/NZS ISO 14644.7:2006.
Published: 13/12/2017
Pages: 37
Table of contents
Cited references
Content history
Table of contents
Header
About this publication
Preface
Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
3.1 General
3.2 Airborne particles
3.3 Occupancy states
3.4 Testing instrumentation (see Annex F)
3.5 Instrument specifications
4 Classification
4.1 Occupancy state(s)
4.2 Particle size(s)
4.3 ISO Class number
4.4 Designation
4.5 Intermediate decimal cleanliness classes and particle size thresholds
5 Demonstration of compliance
5.1 Principle
5.2 Testing
5.3 Airborne particle concentration evaluation
5.4 Test report
Annex A
A.1 Principle
A.2 Apparatus requirements
A.2.1 Particle-counting instrument
A.2.2 Instrument calibration
A.3 Preparation for particle count testing
A.4 Establishment of sampling locations
A.4.1 Deriving the number of sampling locations
A.4.2 Positioning the sampling locations
A.4.3 Sampling locations for large cleanrooms or clean zones
A.4.4 Establishment of single sample volume and sampling time per location
A.5 Sampling procedure
A.5.1
A.5.2
A.5.3
A.5.4
A.5.5
A.5.6
A.6 Processing of results
A.6.1 Recording of results
A.6.1.1 Average concentration of particles at each sampling location
A.6.1.2 Calculate the concentration per cubic metre
A.6.2 Interpretation of results
A.6.2.1 Classification requirements
A.6.2.2 Out-of-specification result
Annex B
B.1 Example 1
B.1.1
B.1.2
B.1.3
B.1.4
B.1.5
B.2 Example 2
B.2.1
B.2.2
B.2.3
B.2.4
B.2.5
B.3 Example 3
B.3.1
B.3.2
B.3.3
B.3.4
B.3.5
B.4 Example 4
B.4.1
B.4.2
B.4.3
B.4.4
B.4.5
B.4.6
B.5 Example 5
B.5.1
B.5.2
B.5.3
B.5.4
B.5.5
B.6 Example 6
B.6.1
B.6.2
B.6.3
B.6.4
B.6.5
Annex C
C.1 Principle
C.2 Consideration of particles larger than 5 µm (macroparticles) — M descriptor
C.2.1 Application
C.2.2 M descriptor format
C.3 Airborne particle count for macroparticles
C.3.1 Principle
C.3.2 General
C.3.3 Sample handling considerations
C.3.4 Measurement methods for macroparticles
C.3.4.1 In situ measurement
C.3.4.2 Collection
C.4 Methods for macroparticle measurement
C.4.1 Macroparticle measurement without particle collection
C.4.1.1 General
C.4.1.2 Light-scattering particle counter (LSAPC) measurement
C.4.1.3 Time-of-flight particle size measurement
C.4.2 Macroparticle measurement with particle collection
C.4.2.1 General
C.4.2.2 Filter collection and microscopic measurement
C.4.2.3 Cascade impactor collection and measurement
C.5 Procedure for macroparticle count
C.6 Test reports for macroparticle sampling
C.7 Adaptation of the macroparticle descriptor to accommodate consideration of ≥ 5 µm particle size for ISO Class 5 cleanrooms
Annex D
D.1 Background and limitations
D.1.1 Background
D.1.2 Limitations
D.2 Basis for the procedure
D.3 Procedure for sampling
D.4 Examples of sequential sampling
D.4.1 Example 1
D.4.2 Example 2
Annex E
E.1 Intermediate decimal cleanliness classes
E.2 Intermediate particle sizes
Annex F
F.1 Introduction
F.2 Instrument specifications
Bibliography
Cited references in this standard
[Current]
Cleanrooms and associated controlled environments — Part 7: Separative devices (clean air hoods, gloveboxes, isolators and mini-environments)
[Current]
Cleanrooms and associated controlled environments — Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration
Content history
[Current]
[Superseded]
DR AS/NZS ISO 14644.1:2017
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